Granted Patent
Utility
US 6,078,105 · App. 09/002,862
Method for manufacturing semiconductor device using spin on glass layer
Inventor:
Yoshihiro Takaishi
Patented Case
View Patent ↗
Granted: Jun 20, 2000
Filed: Jan 5, 1998
Inventor
Yoshihiro Takaishi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.