Granted Patent
Utility
US 6,083,840 · App. 09/200,518
Slurry compositions and method for the chemical-mechanical polishing of copper and copper alloys
Inventors:
Brian Mravic, Anthony M. Pasqualoni, Deepak Mahulikar
Patented Case
View Patent ↗
Granted: Jul 4, 2000
Filed: Nov 25, 1998
Inventors
Brian Mravic
Anthony M. Pasqualoni
Deepak Mahulikar
Assignee (at issue)
Arch Specialty Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.