Granted Patent
Utility
US 6,096,654 · App. 08/942,273
Gapfill of semiconductor structure using doped silicate glasses
Inventors:
Markus Kirchhoff, Matthias Ilg
Patented Case
View Patent ↗
Granted: Aug 1, 2000
Filed: Sep 30, 1997
Inventors
Markus Kirchhoff
Matthias Ilg
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.