Granted Patent
Utility
US 6,097,420 · App. 08/563,487
Method and apparatus for marking patterns by a scanning laser beam, a mask applied to the same apparatus
Inventors:
Yoshimitsu Baba, Satoshi Togari
Patented Case
View Patent ↗
Granted: Aug 1, 2000
Filed: Nov 28, 1995
Inventors
Yoshimitsu Baba
Satoshi Togari
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.