Granted Patent
Utility
US 6,103,942 · App. 09/288,005
Method of high purity silane preparation
Inventors:
Y. Simon Tsuo, Eugene P. Belov, Vadim G. Gerlivanov, Vitali V. Zadde, Solomonida I. Kleschevnikova, Nikolai N. Korneev, Eugene N. Lebedev, Akhsarbek B. Pinov, Eugene A. Ryabenko, Dmitry S. Strebkov, Eugene A. Chernyshev
Patented Case
View Patent ↗
Granted: Aug 15, 2000
Filed: Apr 8, 1999
Inventors
Y. Simon Tsuo
Eugene P. Belov
Vadim G. Gerlivanov
Vitali V. Zadde
Solomonida I. Kleschevnikova
Nikolai N. Korneev
Eugene N. Lebedev
Akhsarbek B. Pinov
Eugene A. Ryabenko
Dmitry S. Strebkov
Eugene A. Chernyshev
Assignee (at issue)
Midwest Research Institute, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.