Granted Patent
Utility
US 6,105,435 · App. 08/957,547
Circuit and apparatus for verifying a chamber seal, and method of depositing a material onto a substrate using the same
Inventor:
Norman L. French, Jr.
Patented Case
View Patent ↗
Granted: Aug 22, 2000
Filed: Oct 24, 1997
Inventor
Norman L. French, Jr.
Assignee (at issue)
Cypress Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.