Granted Patent
Utility
US 6,107,177 · App. 09/382,933
Silylation method for reducing critical dimension loss and resist loss
Inventors:
Zhijian Lu, Wayne M. Moreau
Patented Case
View Patent ↗
Granted: Aug 22, 2000
Filed: Aug 25, 1999
Inventors
Zhijian Lu
Wayne M. Moreau
Assignees (at issue)
Siemens Aktiengesellschaft
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.