Granted Patent
Utility
US 6,107,190 · App. 08/959,268
Method of fabricating semiconductor device
Inventors:
Tetsuya Taguwa, Yoshiaki Yamada
Patented Case
View Patent ↗
Granted: Aug 22, 2000
Filed: Oct 28, 1997
Inventors
Tetsuya Taguwa
Yoshiaki Yamada
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.