Granted Patent
Utility
US 6,109,208 · App. 09/122,061
Plasma generating apparatus with multiple microwave introducing means
Inventors:
Masaaki Tsuchihashi, Minoru Hanazaki, Toshio Komemura, Mutumi Tuda, Kouichi Ono, Kouji Oku, Shinji Nakaguma
Patented Case
View Patent ↗
Granted: Aug 29, 2000
Filed: Jul 27, 1998
Inventors
Masaaki Tsuchihashi
Minoru Hanazaki
Toshio Komemura
Mutumi Tuda
Kouichi Ono
Kouji Oku
Shinji Nakaguma
Assignees (at issue)
MITSUBISHI ELECTRIC CORPORATION
MITSUBISHI ELECTRIC ENGINEERING COMPANY, LIMITED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.