Granted Patent
Utility
US 6,109,861 · App. 09/135,186
Apparatus and method for rotating semiconductor objects
Inventors:
Joseph Michael Freund, Raymond Frank Gruszka, George John Przybylek, Dennis Mark Romero
Patented Case
View Patent ↗
Granted: Aug 29, 2000
Filed: Aug 17, 1998
Inventors
Joseph Michael Freund
Raymond Frank Gruszka
George John Przybylek
Dennis Mark Romero
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.