Granted Patent
Utility
US 6,110,395 · App. 08/918,852
Method and structure for controlling plasma uniformity
Inventor:
Gerald W. Gibson
Patented Case
View Patent ↗
Granted: Aug 29, 2000
Filed: Aug 26, 1997
Inventor
Gerald W. Gibson
Assignee (at issue)
Trikon Technologies Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.