Granted Patent
Utility
US 6,110,820 · App. 08/874,779
Low scratch density chemical mechanical planarization process
Inventors:
Gurtej S. Sandhu, Sujit Sharan
Patented Case
View Patent ↗
Granted: Aug 29, 2000
Filed: Jun 13, 1997
Inventors
Gurtej S. Sandhu
Sujit Sharan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.