Granted Patent
Utility
US 6,114,093 · App. 09/335,343
Method of drawing a pattern by direct writing with charged particle beam utilizing resist containing metal powder
Inventor:
Yasuhisa Yamada
Patented Case
View Patent ↗
Granted: Sep 5, 2000
Filed: Jun 17, 1999
Inventor
Yasuhisa Yamada
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.