Granted Patent
Utility
US 6,114,217 · App. 09/199,706
Method for forming isolation trenches on a semiconductor substrate
Inventor:
Young Tack PARK
Patented Case
View Patent ↗
Granted: Sep 5, 2000
Filed: Nov 24, 1998
Inventor
Young Tack PARK
Assignees (at issue)
Anam Semiconductor
Amkor Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.