IP Library › Granted Patent US 6,121,624
Granted Patent Utility
US 6,121,624 · App. 09/138,741

Method for controlled implantation of elements into the surface or near surface of a substrate

Inventors: Frederick A. Stevie, Ronald F. Roberts, Mark A. Decker
Patented Case View Patent ↗
Granted: Sep 19, 2000 Filed: Aug 24, 1998
Inventors
Frederick A. Stevie
Ronald F. Roberts
Mark A. Decker
Assignee (at issue)
LUCENT TECHNOLOGIES INC.

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Quick Facts
Patent No.
US 6,121,624
App. No.
09/138,741
Filed
1998-08-24
Granted
2000-09-19
Kind
A