Granted Patent
Utility
US 6,125,496 · App. 09/109,225
Pad and roller assembly for cleaning semiconductor wafers
Inventor:
Leonard C. Stevens, Jr.
Patented Case
View Patent ↗
Granted: Oct 3, 2000
Filed: Jun 30, 1998
Inventor
Leonard C. Stevens, Jr.
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.