Granted Patent
Utility
US 6,127,197 · App. 09/104,716
Method for measuring width of wire in semiconductor device using measuring-pattern
Inventors:
Kil-Ho Kim, Kang Sup SHIN, Jong-Il Kim
Patented Case
View Patent ↗
Granted: Oct 3, 2000
Filed: Jun 25, 1998
Inventors
Kil-Ho Kim
Kang Sup SHIN
Jong-Il Kim
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.