Granted Patent
Utility
US 6,127,289 · App. 08/924,268
Method for treating semiconductor wafers with corona charge and devices using corona charging
Inventor:
Damon K. DeBusk
Patented Case
View Patent ↗
Granted: Oct 3, 2000
Filed: Sep 5, 1997
Inventor
Damon K. DeBusk
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.