Granted Patent
Utility
US 6,130,431 · App. 09/096,598
Monolithic pattern-sensitive detector
Inventor:
Kurt Berger
Patented Case
View Patent ↗
Granted: Oct 10, 2000
Filed: Jun 12, 1998
Inventor
Kurt Berger
Assignee (at issue)
EUV, L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.