Granted Patent
Utility
US 6,130,542 · App. 09/192,475
Method for quantitating impurity concentration in a semiconductor device
Inventor:
Toshiyuki Syo
Patented Case
View Patent ↗
Granted: Oct 10, 2000
Filed: Nov 17, 1998
Inventor
Toshiyuki Syo
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.