Granted Patent
Utility
US 6,139,964 · App. 08/468,781
Plasma enhancement apparatus and method for physical vapor deposition
Inventors:
Paul E. Sathrum, Bernard F. Coll
Patented Case
View Patent ↗
Granted: Oct 31, 2000
Filed: Jun 6, 1995
Inventors
Paul E. Sathrum
Bernard F. Coll
Assignee (at issue)
Multi-Arc Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.