Granted Patent
Utility
US 6,140,616 · App. 09/161,323
Wafer level burn-in and test thermal chuck and method
Inventor:
John Andberg
Patented Case
View Patent ↗
Granted: Oct 31, 2000
Filed: Sep 25, 1998
Inventor
John Andberg
Assignee (at issue)
AEHR TEST SYSTEMS
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.