Granted Patent
Utility
US 6,146,242 · App. 09/330,472
Optical view port for chemical mechanical planarization endpoint detection
Inventors:
Randolph Treur, John M. Boyd, Stephan Wolf
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Jun 11, 1999
Inventors
Randolph Treur
John M. Boyd
Stephan Wolf
Assignee (at issue)
Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.