Granted Patent
Utility
US 6,146,467 · App. 09/384,143
Treatment method for semiconductor substrates
Inventors:
Kazushige Takaishi, Ryoko Takada
Patented Case
View Patent ↗
Granted: Nov 14, 2000
Filed: Aug 27, 1999
Inventors
Kazushige Takaishi
Ryoko Takada
Assignees (at issue)
Mitsubishi Materials Silicon Corp.
MITSUBISHI MATERIALS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.