IP Library › Granted Patent US 6,147,042
Granted Patent Utility
US 6,147,042 · App. 09/269,735

Detergent for processes for producing semiconductor devices or producing liquid crystal devices

Inventors: Takashi Yata, Yutaka Koinuma, Kazunori Fukumura, Yoshihito Fukumura
Patented Case View Patent ↗
Granted: Nov 14, 2000 Filed: Jul 2, 1999
Inventors
Takashi Yata
Yutaka Koinuma
Kazunori Fukumura
Yoshihito Fukumura
Assignees (at issue)
Kishimoto Sangyo Co., Ltd.
OTSUKA CHEMICAL CO., LTD.

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Quick Facts
Patent No.
US 6,147,042
App. No.
09/269,735
Filed
1999-07-02
Granted
2000-11-14
Kind
A