Granted Patent
Utility
US 6,149,759 · App. 09/038,288
Process and device for one-sided treatment of disk-shaped objects
Inventor:
Gunther Guggenberger
Patented Case
View Patent ↗
Granted: Nov 21, 2000
Filed: Mar 11, 1998
Inventor
Gunther Guggenberger
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.