Granted Patent
Utility
US 6,150,070 · App. 09/270,534
Method of creating optimal profile in single layer photoresist
Inventors:
Jason P. Minter, William R. Livesay
Patented Case
View Patent ↗
Granted: Nov 21, 2000
Filed: Mar 17, 1999
Inventors
Jason P. Minter
William R. Livesay
Assignee (at issue)
AlliedSignal, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.