Granted Patent
Utility
US 6,150,234 · App. 09/465,151
Trench-diffusion corner rounding in a shallow-trench (STI) process
Inventor:
Christopher S. Olsen
Patented Case
View Patent ↗
Granted: Nov 21, 2000
Filed: Dec 16, 1999
Inventor
Christopher S. Olsen
Assignee (at issue)
VLSI Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.