Granted Patent
Utility
US 6,151,346 · App. 09/370,739
High pulse rate pulse power system with fast rise time and low current
Inventors:
William N. Partlo, Daniel L. Birx, Richard M. Ness, Daniel A. Rothweil, Paul C. Melcher, Brett D. Smith
Patented Case
View Patent ↗
Granted: Nov 21, 2000
Filed: Aug 9, 1999
Inventors
William N. Partlo
Daniel L. Birx
Richard M. Ness
Daniel A. Rothweil
Paul C. Melcher
Brett D. Smith
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.