Granted Patent
Utility
US 6,153,044 · App. 09/071,359
Protection of lithographic components from particle contamination
Inventors:
Leonard E. Klebanoff, Daniel J. Rader
Patented Case
View Patent ↗
Granted: Nov 28, 2000
Filed: Apr 30, 1998
Inventors
Leonard E. Klebanoff
Daniel J. Rader
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.