Granted Patent
Utility
US 6,153,492 · App. 09/492,656
Method for improving the readability of alignment marks
Inventors:
Stephan Wege, Peter Lahnor
Patented Case
View Patent ↗
Granted: Nov 28, 2000
Filed: Jan 27, 2000
Inventors
Stephan Wege
Peter Lahnor
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.