IP Library › Granted Patent US 6,153,852
Granted Patent Utility
US 6,153,852 · App. 09/249,657

Use of a chemically reactive plasma for thermal-chemical processes

Inventors: Andreas Blutke, Edward Bohn, Robert S. Ottinger, Michel Tuszewski, John Vavruska
Patented Case View Patent ↗
Granted: Nov 28, 2000 Filed: Feb 12, 1999
Inventors
Andreas Blutke
Edward Bohn
Robert S. Ottinger
Michel Tuszewski
John Vavruska

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Quick Facts
Patent No.
US 6,153,852
App. No.
09/249,657
Filed
1999-02-12
Granted
2000-11-28
Kind
A