IP Library › Granted Patent US 6,156,171
Granted Patent Utility
US 6,156,171 · App. 08/045,989

Sputtering magnetron

Inventors: Dennis R. Hollars, Delbert F. Waltrip, Robert B. Zubeck, Josef Bonigut, Robert M. Smith, Gary L. Payne
Patented Case View Patent ↗
Granted: Dec 5, 2000 Filed: Apr 9, 1993
Inventors
Dennis R. Hollars
Delbert F. Waltrip
Robert B. Zubeck
Josef Bonigut
Robert M. Smith
Gary L. Payne
Assignee (at issue)
Seagate Technology LLC

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Quick Facts
Patent No.
US 6,156,171
App. No.
08/045,989
Filed
1993-04-09
Granted
2000-12-05
Kind
A