Granted Patent
Utility
US 6,157,662 · App. 09/317,526
F.sub.2 (157nm) laser employing neon as the buffer gas
Inventors:
Michael J. Scaggs, Frank Voss
Patented Case
View Patent ↗
Granted: Dec 5, 2000
Filed: May 24, 1999
Inventors
Michael J. Scaggs
Frank Voss
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.