Granted Patent
Utility
US 6,159,350 · App. 08/371,227
Magnetron sputtering apparatus and mask
Inventors:
Yoshinori Yoshimura, Masaaki Iwasaki
Patented Case
View Patent ↗
Granted: Dec 12, 2000
Filed: Jan 11, 1995
Inventors
Yoshinori Yoshimura
Masaaki Iwasaki
Assignee (at issue)
Sony Disc Technology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.