Granted Patent
Utility
US 6,162,739 · App. 09/248,094
Process for wet etching of semiconductor wafers
Inventors:
Franz Sumnitsch, Gerald Wagner
Patented Case
View Patent ↗
Granted: Dec 19, 2000
Filed: Feb 11, 1999
Inventors
Franz Sumnitsch
Gerald Wagner
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.