Granted Patent
Utility
US 6,168,506 · App. 09/010,008
Apparatus for polishing using improved plate supports
Inventor:
Bob McJunken
Patented Case
View Patent ↗
Granted: Jan 2, 2001
Filed: Jan 21, 1998
Inventor
Bob McJunken
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.