Granted Patent
Utility
US 6,169,038 · App. 09/251,288
Method for rough-etching a semiconductor surface
Inventors:
Hans-Jurgen Kruwinus, FREDERIC KOVACS
Patented Case
View Patent ↗
Granted: Jan 2, 2001
Filed: Feb 17, 1999
Inventors
Hans-Jurgen Kruwinus
FREDERIC KOVACS
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.