Granted Patent
Utility
US 6,171,976 · App. 09/261,098
Method of chemical-mechanical polishing
Inventor:
Chih-Hung Cheng
Patented Case
View Patent ↗
Granted: Jan 9, 2001
Filed: Mar 2, 1999
Inventor
Chih-Hung Cheng
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.