Granted Patent
Utility
US 6,176,120 · App. 09/330,972
Methods of analyzing water soluble contaminants generated during microelectronic device manufacturing processes
Inventors:
Nam-hee You, Dong Soo Lee, Sun-Young Lee, Jung-Sung Hwang
Patented Case
View Patent ↗
Granted: Jan 23, 2001
Filed: Jun 11, 1999
Inventors
Nam-hee You
Dong Soo Lee
Sun-Young Lee
Jung-Sung Hwang
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.