Granted Patent
Utility
US 6,177,279 · App. 09/191,715
Ion extraction process for single side wafers
Inventors:
Peng Sun, Marty Adams
Patented Case
View Patent ↗
Granted: Jan 23, 2001
Filed: Nov 12, 1998
Inventors
Peng Sun
Marty Adams
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.