Granted Patent
Utility
US 6,181,011 · App. 09/221,817
Method of controlling critical dimension of features in integrated circuits (ICS), ICS formed by the method, and systems utilizing same
Inventors:
Michael D. Rostoker, Kumaraguru Muthukumaraswamy
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Dec 29, 1998
Inventors
Michael D. Rostoker
Kumaraguru Muthukumaraswamy
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.