Granted Patent
Utility
US 6,181,724 · App. 09/205,635
Narrow-band oscillation excimer laser and optics thereof
Inventors:
Hirokazu Tanaka, Toru Igarashi
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Dec 3, 1998
Inventors
Hirokazu Tanaka
Toru Igarashi
Assignee (at issue)
KOMATSU LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.