IP Library › Granted Patent US 6,183,562
Granted Patent Utility
US 6,183,562 · App. 08/996,961

Thermal protection system for a chemical vapor deposition machine

Inventors: Tracy Lavalle Pierce, Douglas A. Czaja
Patented Case View Patent ↗
Granted: Feb 6, 2001 Filed: Dec 23, 1997
Inventors
Tracy Lavalle Pierce
Douglas A. Czaja
Assignees (at issue)
SONY CORPORATION OF JAPAN
SONY ELECTRONICS INC.

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Quick Facts
Patent No.
US 6,183,562
App. No.
08/996,961
Filed
1997-12-23
Granted
2001-02-06
Kind
A