Granted Patent
Utility
US 6,183,563 · App. 09/313,765
Apparatus for depositing thin films on semiconductor wafers
Inventors:
Won-sung Choi, Kyu-un Oh
Patented Case
View Patent ↗
Granted: Feb 6, 2001
Filed: May 18, 1999
Inventors
Won-sung Choi
Kyu-un Oh
Assignee (at issue)
IPS Group Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.