Granted Patent
Utility
US 6,184,131 · App. 09/265,692
Process of forming solid thin film from layer of liquid material without void and film forming apparatus used therein
Inventor:
Kazumi Sugai
Patented Case
View Patent ↗
Granted: Feb 6, 2001
Filed: Mar 10, 1999
Inventor
Kazumi Sugai
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.