Granted Patent
Utility
US 6,187,506 · App. 09/368,740
Antireflective coating for photoresist compositions
Inventors:
Shuji Ding, Dinesh N. Khanna, Mark A. Spak, Dana L. Durham, Jianhui Shan, Eleazer Gonzalez
Patented Case
View Patent ↗
Granted: Feb 13, 2001
Filed: Aug 5, 1999
Inventors
Shuji Ding
Dinesh N. Khanna
Mark A. Spak
Dana L. Durham
Jianhui Shan
Eleazer Gonzalez
Assignee (at issue)
Clariant Finance (BVI) Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.