Granted Patent
Utility
US 6,193,798 · App. 09/079,455
Arrangement for treatment of wafer-shaped articles, particularly silicon wafers
Inventor:
Franz Sumnitsch
Patented Case
View Patent ↗
Granted: Feb 27, 2001
Filed: May 15, 1998
Inventor
Franz Sumnitsch
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.