Granted Patent
Utility
US 6,194,273 · App. 09/410,088
Method of manufacturing an insulated gate type semiconductor device having a U-shaped groove
Inventors:
Naoki Matsuura, Hiroyasu Enjo
Patented Case
View Patent ↗
Granted: Feb 27, 2001
Filed: Oct 1, 1999
Inventors
Naoki Matsuura
Hiroyasu Enjo
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.