Granted Patent
Utility
US 6,195,201 · App. 09/238,976
Reflective fly's eye condenser for EUV lithography
Inventors:
Donald G. Koch, James P. McGuire, Joseph Marshall Kunick
Patented Case
View Patent ↗
Granted: Feb 27, 2001
Filed: Jan 27, 1999
Inventors
Donald G. Koch
James P. McGuire
Joseph Marshall Kunick
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.